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  • Park AFM
    Nanomechanical Modes
    Easily measure the mechanical properties of your sample using our set of mechanical scanning modes.
    Each features Park System’s trademark accuracy so you always know
    you’re collecting data you can rely on.

Nanolithography

Advanced Vector Nanolithography Using Closed Loop Scan System

The Nanolithography mode allows you to manipulate and create patterning on the sample surface through applied force or voltage. Tip position for lithography can be easily controlled by importing your own vector drawings or raster (bitmap) images.

nanolithograpy-f1

Pattern created on the surface by plowing the surface with the tip (a) and by changing the surface with applied bias (b)

 
nanolithograpy-f2

Vector Nanolithography. The image is generated in vector by applying negative voltage between -5 and -10 V.
Scanning rate was varied between 1 and 0.1 µm/s. The height of deposited oxide is about 2-4 nm.

Si
Scan size: 4.5µm
Using Probe: Contsc Pt
Imaged on a Park XE-Series using XEL mode.
 

Nanomechanical Modes