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  • Park
    PTR シリーズ
    AFM 仕様
  • NX-PTR
  • XE-PTR
 

Park NX-PTR 仕様

システム
仕様

電動XYステージ

駆動 200 mm × 200 mm、再現性 2 μm


電動 Zステージ

Z 駆動距離25 mm ,分解能 0.1 μm,
再現性 < 1 μm


電動フォーカス ステージ

Z 駆動距離 15mm 光軸上

チルト ステージ

傾斜角度: ±1.8°、
分解能: 3.28nm ( 50μmに対して)


試料許容厚さ

最大 20 mm


全スキャンレンジ クリアランス

< 2 nm


COGNEX パターン認識

パターンアライン分解能 1/4 ピクセル

 

スキャナ
性能

XY スキャン レンジ

100 µm × 100 µm


XY スキャナ 分解能

0.095 nm (20 ビット位置センサー)

Z スキャン レンジ

15 µm

Z スキャナ分解能

0.01 nm

 

AFM と XY ステージ制
御エレクトロニクス

ADC

18 チャネンネル
4 高速 ADC チャンネル (64 MSPS)
24-ビットADC ( X、Y及び Z スキャナ位置センサー用)


最大スキャンサイズ

4096 x 4096 ピクセル

DAC

12 チャンネル
2 高速 DAC チャンネル (64 MSPS)
20-ビット DACs (X、Y及び Z スキャナ位置センサー用)

 

振動、音響ノイズ、
及びESD性能

床振動ノイ

< 0.5 μm/s (10 Hz~ 200 Hz アクティブ防振台付属

アクースティックノイズ

>20 dB 減衰 アクースティックエンクロージャー付

 

設備
条件

室温 (待機時)

10 °C ~ 40 °C


室温 (稼働時)

18 °C ~ 24 °C


湿度

30% ~ 60% (結露しない事)


床振動レベル

VC-E (3 µm/sec)


音響ノイズ

65 dB以下

排気系

真空 : -60 kPa


電源

100/120 V/ 208~240 V、単相、 15 A (最大)


総合消費電力

2 KW (公称)


グラウンド抵抗

100 以下

 

寸法 (mm)
& 重量 (kg)

アクースティック エンクロージャー

880 (幅) × 980 (奥行) × 1460 (高)、約620
kg (基本NX-HDM システムを含む)


制御キャビネット

600 (幅) × 900 (奥行) × 1600 (高)、
約 170 kg (制御系を含む)

システム フロア スペース

1720 (幅) × 920 (奥行)


天上高

2000 以上


ユーザー ワーキング スペース

2400 (幅) × 2450 (奥行), 最小 (寸法単位: mm)

demensions[ Park NX-PTR system dimension ] / [ Park NX-PTR installation layout ]
 
 

Park XE-PTR Specifications

SPECIFICATIONS

System Specification

Motorized XY stage : travels up to 275 mm × 150 mm, 0.5 μm resolution
Motorized Z stage : ~30 mm Z travel distance, ~0.08 μm resolution, < 1 μm repeatability
Motorized Focus Stage : 11 mm Z travel distance for on-axis optics
Sample Thickness Allowance : up to 20 mm Full scan range
Z run-out : < 2 nm, repeatability < 1 nm
COGNEX Pattern Recognition : pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range : 100 μm × 100 μm (high voltage mode), 10 μm × 10 μm (low voltage mode)
XY Scanner Resolution : 1.5 nm (high voltage mode), < 0.2 nm (low voltage mode)
Z Scanner Range : 12 μm (high voltage mode), 1.7 μm (low voltage mode)
Z Scanner Resolution : < 0.2 nm

 

AFM and XY Stage

Control Electronics Controller Processing Unit : 600 MHz and 4800 MIPS
Signal ADC & DAC : 16-bit, 500 kHz bandwidth, internal lock-in

 

Compliances

CE
SEMI Standard S2-0703
SEMI Standard S8-1103

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration : < 0.5 μm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)
Acoustic Noise : >20 dB attenuation w/ Acoustic Enclosure

 

Operation and Maintenance

Throughput : >10 samples/hr (parameter dependent)
Cantilever Life : >400 images w/ NCHR cantilevers (parameter dependent)

 

Facility Requirements

Room Temperature (Stand By) : 10 °C ~ 40 °C Room
Temperature (Operating) : 18 °C ~ 24 °C
Humidity : 30% to 60% (not condensing)
Floor Vibration Level : VC-E (3 μm/sec)
Acoustic Noise : Below 65 dB
Pneumatics : Vacuum : -60 kPa
Supply Rating : 100/120 V/ 208~240 V, single phase, 15A (max)
Total Power Consumption : 2 kW (typical)
Ground Resistance : Below 100 ohms

 

Dimension & Weight

System : 880(w) × 980(d) × 1460(h), 690 kg approx. (incl. XE-PTR system)
Control Cabinet : 800(w) × 800(d) × 1000(h), 160 kg approx. (incl. controllers)
System Floor Space : 1780(w) × 980(d)
Ceiling Height : 2000 or more
Operator Working Space : 2400(w) × 2450(d) minimum (dimension unit: mm)

footprint[ Park XE-PTR installation layout ]
 

Software & User Interface

XEA - Industrial Automation & Analysis

XEA is a system software for automation that carries out the AFM measurement of a sample following the preset procedure written in a recipe file. User-friendly XEA architecture provides flexibility to operator to perform various system-wide functions.
 
• Supports auto, semi-auto, and manual mode
• Editable measurement method for each automated procedure
• Live monitoring of the measurement process
• Automatic analysis of acquired measurement data

 

XEP – Data Acquisition

All the user controls on AFM measurements are operated through XEP, the data acquisition program. The user-oriented interface provides easy operation of AFM.
 
• Simultaneous data acquisition of up to 16 images
• Maximum 4096 × 4096 image size
• Dedicated Force-distance and I-V spectroscopy with batch processing
• Cantilever spring constant calibration
• Script-level control through external program (LabVIEW, C++)

 

XEI – Image Processing and Analysis

XEI is the AFM image processing and analysis program. The powerful processing algorithms make the analysis easy and streamlined. With its most advanced and versatile imaging features, XE users can obtain essential and critical information from their experiment.
 
• Image analysis of line profile, region, 3D rendering
• Spectroscopy data analysis module (F-d, I-V)
• Directly copy/paste to presentation program
• Multiple image comparison
• Image overlay of two different images

 

Options

Customized Sample Fixture

Park Systems can prepare customized sample fixtures to support customers’ specific samples, row bars or individual sliders. The customized sample fixture guarantees a superior connection between the measuring sample and the XE-PTR.

 

Automatic Tip Exchange (ATX)

Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.

 

Non-damaging Customized HGA Fixture

HGA fixture can be custom built to firmly fit a specific HGA design provided by the customer, providing the most stable fixture in the industry. The non-damaging fixture allows users to easily load and unload the entire HGA, without causing any damage to the HGA. HGA then can be dismounted, and further tested. Up to 5 HGA samples of the same type can be mounted at the same time.

 

Ionization System

Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.

Park PTR-仕様